Small Angle X-Ray Scattering (SAXS) and IR Study of Microvoid Dynamics in Annealed RF Sputter-Deposited a-Si:H

Small Angle X-Ray Scattering (SAXS) and IR Study of Microvoid Dynamics in Annealed RF Sputter-Deposited a-Si:H

Research output: Contribution to conference › Paper

Original language	American English
Pages	281-285
Number of pages	5
State	Published - 1992
Event	Amorphous Silicon Technology - 1992: Materials Research Society Symposium - San Francisco, California Duration: 27 Apr 1992 → 1 May 1992

Conference

Conference	Amorphous Silicon Technology - 1992: Materials Research Society Symposium
City	San Francisco, California
Period	27/04/92 → 1/05/92

Bibliographical note

Work performed by Ames Laboratory, Iowa State University, Ames, Iowa and Colorado School of Mines, Golden, Colorado

NREL Publication Number

ACNR/CP-14619

Cite this

@conference{cc0be5d1d5844788816558f06bd50efe,

title = "Small Angle X-Ray Scattering (SAXS) and IR Study of Microvoid Dynamics in Annealed RF Sputter-Deposited a-Si:H",

author = "NREL",

note = "Work performed by Ames Laboratory, Iowa State University, Ames, Iowa and Colorado School of Mines, Golden, Colorado; Amorphous Silicon Technology - 1992: Materials Research Society Symposium ; Conference date: 27-04-1992 Through 01-05-1992",

year = "1992",

language = "American English",

pages = "281--285",

}

TY - CONF

T1 - Small Angle X-Ray Scattering (SAXS) and IR Study of Microvoid Dynamics in Annealed RF Sputter-Deposited a-Si:H

AU - NREL, null

N1 - Work performed by Ames Laboratory, Iowa State University, Ames, Iowa and Colorado School of Mines, Golden, Colorado

PY - 1992

Y1 - 1992

M3 - Paper

SP - 281

EP - 285

T2 - Amorphous Silicon Technology - 1992: Materials Research Society Symposium

Y2 - 27 April 1992 through 1 May 1992

ER -