Small Angle X-Ray Scattering with Microvoids in the a-SiC:H Alloy

    Research output: Contribution to conferencePaper

    Original languageAmerican English
    Pages39-42
    Number of pages4
    StatePublished - 1988
    EventInternational Topical Conference on Hydrogenated Amorphous Silicon Devices and Technology - IBM Thomas J. Watson Research Center, Yorktown Heights, New York
    Duration: 21 Nov 198823 Nov 1988

    Conference

    ConferenceInternational Topical Conference on Hydrogenated Amorphous Silicon Devices and Technology
    CityIBM Thomas J. Watson Research Center, Yorktown Heights, New York
    Period21/11/8823/11/88

    NREL Publication Number

    • ACNR/CP-212-10724

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