SO3 Cleaning Process in Semiconductor Manufacturing: NICE3 Project Fact Sheet

    Research output: NRELFact Sheet

    Abstract

    This fact sheet explains how Anon, Inc., has developed a novel method of removing photoresist--a light-sensitive material used to produce semiconductor wafers for computers--from the computer manufacturing process at reduced cost and greater efficiency. The new technology is technically superior to existing semiconductor cleaning methods and results in reduced use of hazardous chemicals.
    Original languageAmerican English
    Number of pages2
    StatePublished - 1999

    NREL Publication Number

    • NREL/FS-330-25027

    Other Report Number

    • DOE/GO-10099-593

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