Solid-Phase Crystallization Kinetics and Grain Structure During Thermal Annealing of a-Si:H Grown by Chemical Vapor Deposition

David Ginley, F. Xu, A.H. Mahan, S.P. Ahrenkiel

    Research output: Contribution to journalArticlepeer-review

    Original languageAmerican English
    Pages (from-to)972-977
    Number of pages6
    JournalMaterials Science and Engineering B: Advanced Functional Solid-State Materials
    Volume176
    Issue number13
    DOIs
    StatePublished - 2011

    NREL Publication Number

    • NREL/JA-5200-52874

    Keywords

    • annealing
    • crystallization kinetics
    • hydrogenated amorphous silicon
    • nucleation
    • transmission electron microscopy

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