Original language | American English |
---|---|
Pages (from-to) | 72-76 |
Number of pages | 5 |
Journal | Journal of vacuum science & technology |
Volume | 17 |
Issue number | 1 |
DOIs | |
State | Published - 1980 |
NREL Publication Number
- SERI/JA-334-393
Research output: Contribution to journal › Article › peer-review
Original language | American English |
---|---|
Pages (from-to) | 72-76 |
Number of pages | 5 |
Journal | Journal of vacuum science & technology |
Volume | 17 |
Issue number | 1 |
DOIs | |
State | Published - 1980 |