| Original language | American English |
|---|---|
| Pages (from-to) | 72-76 |
| Number of pages | 5 |
| Journal | Journal of vacuum science & technology |
| Volume | 17 |
| Issue number | 1 |
| DOIs | |
| State | Published - 1980 |
NREL Publication Number
- SERI/JA-334-393
Research output: Contribution to journal › Article › peer-review
| Original language | American English |
|---|---|
| Pages (from-to) | 72-76 |
| Number of pages | 5 |
| Journal | Journal of vacuum science & technology |
| Volume | 17 |
| Issue number | 1 |
| DOIs | |
| State | Published - 1980 |