Solidification Interface Shape Control in a Continuous Czochralski Silicon Growth System

Research output: Contribution to journal › Article › peer-review

NREL Publication Number

@article{dd40ffe4b80a40fa9e4776f09ef68ca6,

title = "Solidification Interface Shape Control in a Continuous Czochralski Silicon Growth System",

keywords = "computer simulations, control algorithm, Czochralski growth, industrial crystallization, semiconductor, silicon",

author = "NREL",

year = "2006",

doi = "10.1016/j.jcrysgro.2005.11.016",

language = "American English",

volume = "287",

pages = "252--257",

journal = "Journal of Crystal Growth",

issn = "0022-0248",

publisher = "Elsevier",

number = "2",

}

TY - JOUR

T1 - Solidification Interface Shape Control in a Continuous Czochralski Silicon Growth System

AU - NREL, null

PY - 2006

Y1 - 2006

KW - computer simulations

KW - control algorithm

KW - Czochralski growth

KW - industrial crystallization

KW - semiconductor

KW - silicon

U2 - 10.1016/j.jcrysgro.2005.11.016

DO - 10.1016/j.jcrysgro.2005.11.016

M3 - Article

SN - 0022-0248

VL - 287

SP - 252

EP - 257

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

IS - 2

ER -