Solution Deposition of Amorphous IZO Films by Ultrasonic Spray Pyrolysis

Robert Pasquarelli; Maikel Van Hest; Alexander Miedaner; Calvin Curtis; John Perkins; Joseph Berry; Ryan O'Hayre; David Ginley

doi:10.1109/pvsc.2009.5411672

Solution Deposition of Amorphous IZO Films by Ultrasonic Spray Pyrolysis

Robert Pasquarelli, Maikel Van Hest, Alexander Miedaner, Calvin Curtis, John Perkins, Joseph Berry, Ryan O'Hayre, David Ginley

Materials, Chemical, and Computational Science

Research output: Contribution to conference › Paper › peer-review

2 Scopus Citations

Abstract

Atmospheric-pressure solution deposition of the transparent conducting oxide (TCO), amorphous indium-zinc oxide (α-IZO), was investigated as an alternative to traditional vacuum-based physical vapor deposition techniques for photovoltaic applications. Solution processing is attractive due to its ease and potential to lower device manufacturing costs. Here we report on α-IZO films prepared by ultrasonic spray pyrolysis from solutions of an indium-zinc formate (IZF) precursor. Thin, crack-free, amorphous IZO films with good optical transmittance (>75%) and conductivities of -34 S/cm were produced from an IZF-HNO₃-methanol ink using joint RTP and Ar-H₂ annealing.

Original language	American English
Pages	309-311
Number of pages	3
DOIs	https://doi.org/10.1109/pvsc.2009.5411672 https://doi.org/10.1109/PVSC.2009.5411672
State	Published - 2009
Event	2009 34th IEEE Photovoltaic Specialists Conference, PVSC 2009 - Philadelphia, PA, United States Duration: 7 Jun 2009 → 12 Jun 2009

Conference

Conference	2009 34th IEEE Photovoltaic Specialists Conference, PVSC 2009
Country/Territory	United States
City	Philadelphia, PA
Period	7/06/09 → 12/06/09

Bibliographical note

For preprint version, see NREL/CP-520-46016

NREL Publication Number

NREL/CP-520-44945

Keywords

amorphous materials
chemical vapor deposition
conductive films
costs
manufacturing processes
optical films
photovoltaic systems
solar power generation
spraying
vacuum technology

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Pasquarelli, R., Van Hest, M., Miedaner, A., Curtis, C., Perkins, J., Berry, J., O'Hayre, R., & Ginley, D. (2009). Solution Deposition of Amorphous IZO Films by Ultrasonic Spray Pyrolysis. 309-311. Paper presented at 2009 34th IEEE Photovoltaic Specialists Conference, PVSC 2009, Philadelphia, PA, United States. https://doi.org/10.1109/pvsc.2009.5411672, https://doi.org/10.1109/PVSC.2009.5411672

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title = "Solution Deposition of Amorphous IZO Films by Ultrasonic Spray Pyrolysis",

abstract = "Atmospheric-pressure solution deposition of the transparent conducting oxide (TCO), amorphous indium-zinc oxide (α-IZO), was investigated as an alternative to traditional vacuum-based physical vapor deposition techniques for photovoltaic applications. Solution processing is attractive due to its ease and potential to lower device manufacturing costs. Here we report on α-IZO films prepared by ultrasonic spray pyrolysis from solutions of an indium-zinc formate (IZF) precursor. Thin, crack-free, amorphous IZO films with good optical transmittance (>75%) and conductivities of -34 S/cm were produced from an IZF-HNO3-methanol ink using joint RTP and Ar-H2 annealing.",

keywords = "amorphous materials, chemical vapor deposition, conductive films, costs, manufacturing processes, optical films, photovoltaic systems, solar power generation, spraying, vacuum technology",

author = "Robert Pasquarelli and {Van Hest}, Maikel and Alexander Miedaner and Calvin Curtis and John Perkins and Joseph Berry and Ryan O'Hayre and David Ginley",

note = "For preprint version, see NREL/CP-520-46016; 2009 34th IEEE Photovoltaic Specialists Conference, PVSC 2009 ; Conference date: 07-06-2009 Through 12-06-2009",

year = "2009",

doi = "10.1109/pvsc.2009.5411672",

language = "American English",

pages = "309--311",

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Pasquarelli, R, Van Hest, M, Miedaner, A, Curtis, C, Perkins, J, Berry, J, O'Hayre, R & Ginley, D 2009, 'Solution Deposition of Amorphous IZO Films by Ultrasonic Spray Pyrolysis', Paper presented at 2009 34th IEEE Photovoltaic Specialists Conference, PVSC 2009, Philadelphia, PA, United States, 7/06/09 - 12/06/09 pp. 309-311. https://doi.org/10.1109/pvsc.2009.5411672, https://doi.org/10.1109/PVSC.2009.5411672

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T1 - Solution Deposition of Amorphous IZO Films by Ultrasonic Spray Pyrolysis

AU - Pasquarelli, Robert

AU - Van Hest, Maikel

AU - Miedaner, Alexander

AU - Curtis, Calvin

AU - Perkins, John

AU - Berry, Joseph

AU - O'Hayre, Ryan

AU - Ginley, David

N1 - For preprint version, see NREL/CP-520-46016

PY - 2009

Y1 - 2009

N2 - Atmospheric-pressure solution deposition of the transparent conducting oxide (TCO), amorphous indium-zinc oxide (α-IZO), was investigated as an alternative to traditional vacuum-based physical vapor deposition techniques for photovoltaic applications. Solution processing is attractive due to its ease and potential to lower device manufacturing costs. Here we report on α-IZO films prepared by ultrasonic spray pyrolysis from solutions of an indium-zinc formate (IZF) precursor. Thin, crack-free, amorphous IZO films with good optical transmittance (>75%) and conductivities of -34 S/cm were produced from an IZF-HNO3-methanol ink using joint RTP and Ar-H2 annealing.

AB - Atmospheric-pressure solution deposition of the transparent conducting oxide (TCO), amorphous indium-zinc oxide (α-IZO), was investigated as an alternative to traditional vacuum-based physical vapor deposition techniques for photovoltaic applications. Solution processing is attractive due to its ease and potential to lower device manufacturing costs. Here we report on α-IZO films prepared by ultrasonic spray pyrolysis from solutions of an indium-zinc formate (IZF) precursor. Thin, crack-free, amorphous IZO films with good optical transmittance (>75%) and conductivities of -34 S/cm were produced from an IZF-HNO3-methanol ink using joint RTP and Ar-H2 annealing.

KW - amorphous materials

KW - chemical vapor deposition

KW - conductive films

KW - costs

KW - manufacturing processes

KW - optical films

KW - photovoltaic systems

KW - solar power generation

KW - spraying

KW - vacuum technology

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DO - 10.1109/pvsc.2009.5411672

M3 - Paper

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EP - 311

T2 - 2009 34th IEEE Photovoltaic Specialists Conference, PVSC 2009

Y2 - 7 June 2009 through 12 June 2009

ER -

Solution Deposition of Amorphous IZO Films by Ultrasonic Spray Pyrolysis

Abstract

Conference

Bibliographical note

NREL Publication Number

Keywords

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