Original language | American English |
---|---|
Pages (from-to) | 1549-1556 |
Number of pages | 8 |
Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
Volume | B 9 |
Issue number | 3 |
DOIs | |
State | Published - 1991 |
Bibliographical note
SERI-TP-213-4198NREL Publication Number
- ACNR/JA-213-12194