Spectroscopic Ellipsometry and Photoluminescence Measurements of as-Deposited and Annealed Silicon Rich Oxynitride Films

Sandeep Kohli, Jeremy A. Theil, Patrick R. McCurdy, Patricia C. Dippo, Richard K. Ahrenkiel, Christopher D. Rithner, Peter K. Dorhout

Research output: Contribution to journal › Article › peer-review

3 Scopus Citations

Fingerprint

Dive into the research topics of 'Spectroscopic Ellipsometry and Photoluminescence Measurements of as-Deposited and Annealed Silicon Rich Oxynitride Films'. Together they form a unique fingerprint.

Material Science