Spectroscopic Ellipsometry and Photoluminescence Measurements of as-Deposited and Annealed Silicon Rich Oxynitride Films

  • Sandeep Kohli
  • , Jeremy A. Theil
  • , Patrick R. McCurdy
  • , Patricia C. Dippo
  • , Richard K. Ahrenkiel
  • , Christopher D. Rithner
  • , Peter K. Dorhout

Research output: Contribution to journal › Article › peer-review

3 Scopus Citations

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