Spectroscopic Investigation of the Amorphous to Microcrystalline Transition in Silicon Prepared by Reactive Magnetron Sputtering

Spectroscopic Investigation of the Amorphous to Microcrystalline Transition in Silicon Prepared by Reactive Magnetron Sputtering

Research output: Contribution to conference › Paper

Original language	American English
Pages	521-526
Number of pages	6
State	Published - 1993
Event	Amorphous Silicon Technology - 1993: Materials Research Society Symposium - San Francisco, California Duration: 13 Apr 1993 → 16 Apr 1993

Conference

Conference	Amorphous Silicon Technology - 1993: Materials Research Society Symposium
City	San Francisco, California
Period	13/04/93 → 16/04/93

Bibliographical note

Work performed by North Carolina State University, Raleigh, North Carolina

NREL Publication Number

ACNR/CP-14392

Cite this

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title = "Spectroscopic Investigation of the Amorphous to Microcrystalline Transition in Silicon Prepared by Reactive Magnetron Sputtering",

author = "NREL",

note = "Work performed by North Carolina State University, Raleigh, North Carolina; Amorphous Silicon Technology - 1993: Materials Research Society Symposium ; Conference date: 13-04-1993 Through 16-04-1993",

year = "1993",

language = "American English",

pages = "521--526",

}

TY - CONF

T1 - Spectroscopic Investigation of the Amorphous to Microcrystalline Transition in Silicon Prepared by Reactive Magnetron Sputtering

AU - NREL, null

N1 - Work performed by North Carolina State University, Raleigh, North Carolina

PY - 1993

Y1 - 1993

M3 - Paper

SP - 521

EP - 526

T2 - Amorphous Silicon Technology - 1993: Materials Research Society Symposium

Y2 - 13 April 1993 through 16 April 1993

ER -