Sputter Crater Contour Mapping with Multilayered Films

    Research output: Contribution to journalArticle

    Original languageAmerican English
    Pages (from-to)1087-1092
    Number of pages6
    JournalScanning Electron Microscopy
    Issue numberIII
    StatePublished - 1985

    Bibliographical note

    Work performed by Department of Physics and Energy Science, University of Colorado, Colorado Springs, Colorado; Solar Energy Research Institute, Golden, Colorado; Center for Research in Surface Science, Department of Physics, Montana State University, Bozeman, Montana; and Hewlett-Packard Corporation, Colorado Springs, Colorado

    NREL Publication Number

    • ACNR/JA-213-6838

    Cite this