Sputter Crater Contour Mapping with Multilayered Films

Sputter Crater Contour Mapping with Multilayered Films

NREL

Research output: Contribution to journal › Article

Original language	American English
Pages (from-to)	1087-1092
Number of pages	6
Journal	Scanning Electron Microscopy
Volume	1985
Issue number	III
State	Published - 1985

Bibliographical note

Work performed by Department of Physics and Energy Science, University of Colorado, Colorado Springs, Colorado; Solar Energy Research Institute, Golden, Colorado; Center for Research in Surface Science, Department of Physics, Montana State University, Bozeman, Montana; and Hewlett-Packard Corporation, Colorado Springs, Colorado

NLR Publication Number

ACNR/JA-213-6838

Cite this

@article{42b921a5457241d68d97020c71a6d4b8,

title = "Sputter Crater Contour Mapping with Multilayered Films",

author = "NREL",

note = "Work performed by Department of Physics and Energy Science, University of Colorado, Colorado Springs, Colorado; Solar Energy Research Institute, Golden, Colorado; Center for Research in Surface Science, Department of Physics, Montana State University, Bozeman, Montana; and Hewlett-Packard Corporation, Colorado Springs, Colorado",

year = "1985",

language = "American English",

volume = "1985",

pages = "1087--1092",

journal = "Scanning Electron Microscopy",

issn = "0586-5581",

publisher = "Scanning Microscopy International",

number = "III",

}

TY - JOUR

T1 - Sputter Crater Contour Mapping with Multilayered Films

AU - NREL, null

N1 - Work performed by Department of Physics and Energy Science, University of Colorado, Colorado Springs, Colorado; Solar Energy Research Institute, Golden, Colorado; Center for Research in Surface Science, Department of Physics, Montana State University, Bozeman, Montana; and Hewlett-Packard Corporation, Colorado Springs, Colorado

PY - 1985

Y1 - 1985

M3 - Article

SN - 0586-5581

VL - 1985

SP - 1087

EP - 1092

JO - Scanning Electron Microscopy

JF - Scanning Electron Microscopy

IS - III

ER -