Sputtered In2O3 and ITO Thin Films Containing Zirconium: Article No. 083547

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@article{7a99e18639474d9089da8e1e81f82790,

title = "Sputtered In2O3 and ITO Thin Films Containing Zirconium: Article No. 083547",

keywords = "electrical properties, optical properties, thin films, transparent conducting oxides",

author = "Timothy Gessert",

year = "2009",

doi = "10.1063/1.3116542",

language = "American English",

volume = "105",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "8",

}

TY - JOUR

T1 - Sputtered In2O3 and ITO Thin Films Containing Zirconium

T2 - Article No. 083547

AU - Gessert, Timothy

PY - 2009

Y1 - 2009

KW - electrical properties

KW - optical properties

KW - thin films

KW - transparent conducting oxides

U2 - 10.1063/1.3116542

DO - 10.1063/1.3116542

M3 - Article

SN - 0021-8979

VL - 105

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 8

ER -