Stoichiometric Analysis of Compositionally Graded Combinatorial Amorphous Thin Film Oxides Using Laser-Induced Breakdown Spectroscopy

N. Edwin Widjonarko, John D. Perkins, Jennifer E. Leisch, Philip A. Parilla, Calvin J. Curtis, David S. Ginley, Joseph J. Berry

Research output: Contribution to journalArticlepeer-review

11 Scopus Citations

Abstract

Laser-induced breakdown spectroscopy (LIBS) is a recently developed locally destructive elemental analysis technique that can be used to analyze solid, liquid, and gaseous samples. In the system explored here, a neodymium-doped yttrium aluminum garnet laser ablates a small amount of the sample and spectral emission from the plume is analyzed using a set of synchronized spectrometers. We explore the use of LIBS to map the stoichiometry of compositionally graded amorphous indium zinc oxide thin-film libraries. After optimization of the experimental parameters (distance between lens and samples, spot size on the samples, etc.), the LIBS system was calibrated against inductively coupled plasma atomic emission spectroscopy which resulted in a very consistent LIBS-based elemental analysis. Various parameters that need to be watched closely in order to produce consistent results are discussed. We also compare LIBS and x-ray fluorescence as techniques for the compositional mapping of libraries.

Original languageAmerican English
Article numberArticle No. 073103
Number of pages8
JournalReview of Scientific Instruments
Volume81
Issue number7
DOIs
StatePublished - Jul 2010

NREL Publication Number

  • NREL/JA-520-49286

Keywords

  • laser-induced breakdown spectroscopy
  • oxides
  • photovoltaics
  • spectroscopy
  • thin film

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