Storage Conditions for High-Accuracy Composition Standards of AlGaAs

K. A. Bertness, A. Roshko, S. E. Asher, C. L. Perkins

Research output: Contribution to journalArticlepeer-review

1 Scopus Citations


AlGaAs epitaxial films were stored under different environmental conditions and the resulting surface oxidation and contamination variations measured with several analytical techniques. Auger depth profiles confirmed that contamination had been confined to within approximately 10 nm of the surface for all specimens stored in controlled environments for over three years. We also performed an atomic force microscopy study on a multilayer structure, measuring the height of the oxides formed in air. Surface contamination was examined in more detail with time-of-flight secondary ion mass spectrometry and x-ray photoelectron spectroscopy. Surface oxides changed over time, and could be altered by sputtering. Sputtering was particularly effective in removing hydrocarbons. Based on these results, AlGaAs reference films for x<0.4 should remain stable for at least five years if stored in either nitrogen or vacuum environments, with allowance for periodic handling in air.

Original languageAmerican English
Pages (from-to)1267-1271
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Issue number3
StatePublished - 2005

NREL Publication Number

  • NREL/JA-520-37599


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