Abstract
The nature of spontaneous lateral composition modulation and its relationship to surface morphology during the growth of (AlAs)m(InAs)n short-period superlattices by molecular beam epitaxy are investigated as a function of the global strain between the short-period superlattice and (001)InP substrate. For samples grown under tension, transmission electron and atomic force microscopy reveal composition modulations along directions close to 〈310〉 coupled to a surface cusping. For samples grown under compression, we observe composition modulations roughly along the elastically soft 〈100〉 directions coupled to a surface rippling. For high strains (≥0.7%), with individual InAs layer thicknesses ≤1.6 monolayers, we observe weak or no composition modulations.
| Original language | American English |
|---|---|
| Pages (from-to) | 1844-1846 |
| Number of pages | 3 |
| Journal | Applied Physics Letters |
| Volume | 73 |
| Issue number | 13 |
| DOIs | |
| State | Published - 1998 |
Bibliographical note
Work performed by National Renewable Energy Laboratory, Golden, Colorado; and Sandia National Laboratories, Albuquerque, New MexicoNLR Publication Number
- NREL/JA-520-24776