Original language | American English |
---|---|
Pages (from-to) | 465-473 |
Number of pages | 9 |
Journal | Integrated Ferroelectrics |
Volume | 53 |
Issue number | 1 |
DOIs | |
State | Published - 2003 |
NREL Publication Number
- NREL/JA-520-35974
Keywords
- deposition
- substrates
- thin films
Research output: Contribution to journal › Article › peer-review
Original language | American English |
---|---|
Pages (from-to) | 465-473 |
Number of pages | 9 |
Journal | Integrated Ferroelectrics |
Volume | 53 |
Issue number | 1 |
DOIs | |
State | Published - 2003 |