| Original language | American English |
|---|---|
| Pages (from-to) | 465-473 |
| Number of pages | 9 |
| Journal | Integrated Ferroelectrics |
| Volume | 53 |
| Issue number | 1 |
| DOIs | |
| State | Published - 2003 |
NLR Publication Number
- NREL/JA-520-35974
Keywords
- deposition
- substrates
- thin films
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