Structural Properties of Hot Wire a-Si:H Films Deposited at Rates in Excess of 100 A/s

Research output: Contribution to journalArticlepeer-review

Original languageAmerican English
Pages (from-to)5038-5047
Number of pages10
JournalJournal of Applied Physics
Volume90
Issue number10
DOIs
StatePublished - 2001

NREL Publication Number

  • NREL/JA-520-31843

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