Structural Studies of Hydrogen-Bombarded Silicon Using Ellipsometry and Transmission Electron Microscopy

Research output: Contribution to journal › Article

Original language	American English
Pages (from-to)	153-158
Number of pages	6
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	4
Issue number	2
DOIs	https://doi.org/10.1116/1.573463
State	Published - 1986

Work performed by Standard Oil Company Research Center, Cleveland, Ohio and Solar Energy Research Institute, Golden, Colorado

NREL Publication Number

@article{ad131469830543ffb73b5efaf4085109,

title = "Structural Studies of Hydrogen-Bombarded Silicon Using Ellipsometry and Transmission Electron Microscopy",

author = "NREL",

note = "Work performed by Standard Oil Company Research Center, Cleveland, Ohio and Solar Energy Research Institute, Golden, Colorado",

year = "1986",

doi = "10.1116/1.573463",

language = "American English",

volume = "4",

pages = "153--158",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "2",

}

TY - JOUR

T1 - Structural Studies of Hydrogen-Bombarded Silicon Using Ellipsometry and Transmission Electron Microscopy

AU - NREL, null

N1 - Work performed by Standard Oil Company Research Center, Cleveland, Ohio and Solar Energy Research Institute, Golden, Colorado

PY - 1986

Y1 - 1986

U2 - 10.1116/1.573463

DO - 10.1116/1.573463

M3 - Article

SN - 0734-2101

VL - 4

SP - 153

EP - 158

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 2

ER -