Studies of Thin-Film Growth of Sputtered Hydrogenated Amorphous Silicon

    Research output: Contribution to journalArticle

    Original languageAmerican English
    Pages (from-to)187-204
    Number of pages18
    JournalSolar Energy Materials
    Issue number1-3
    StatePublished - 1982

    Bibliographical note

    Work performed by Corporate Research Laboratory, Exxon Research and Engineering Company, Linden, New Jersey

    NREL Publication Number

    • ACNR/JA-7289

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