Studies of Thin-Film Growth of Sputtered Hydrogenated Amorphous Silicon

Research output: Contribution to journal › Article

Work performed by Corporate Research Laboratory, Exxon Research and Engineering Company, Linden, New Jersey

NREL Publication Number

@article{ad9e85adc2ec4796bb761215f238d0ae,

title = "Studies of Thin-Film Growth of Sputtered Hydrogenated Amorphous Silicon",

author = "NREL",

note = "Work performed by Corporate Research Laboratory, Exxon Research and Engineering Company, Linden, New Jersey",

year = "1982",

doi = "10.1016/0165-1633(82)90062-4",

language = "American English",

volume = "8",

pages = "187--204",

journal = "Solar Energy Materials",

issn = "0165-1633",

publisher = "Elsevier B.V.",

number = "1-3",

}

TY - JOUR

T1 - Studies of Thin-Film Growth of Sputtered Hydrogenated Amorphous Silicon

AU - NREL, null

N1 - Work performed by Corporate Research Laboratory, Exxon Research and Engineering Company, Linden, New Jersey

PY - 1982

Y1 - 1982

U2 - 10.1016/0165-1633(82)90062-4

DO - 10.1016/0165-1633(82)90062-4

M3 - Article

SN - 0165-1633

VL - 8

SP - 187

EP - 204

JO - Solar Energy Materials

JF - Solar Energy Materials

IS - 1-3

ER -