Study of Ion-Beam-Sputtered ZnO Films as a Function of Deposition Temperature

Research output: Contribution to journal › Article › peer-review

Original language	American English
Pages (from-to)	1507-1512
Number of pages	6
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	12
Issue number	4
DOIs	https://doi.org/10.1116/1.579346
State	Published - 1994

NLR Publication Number

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title = "Study of Ion-Beam-Sputtered ZnO Films as a Function of Deposition Temperature",

author = "NREL",

year = "1994",

doi = "10.1116/1.579346",

language = "American English",

volume = "12",

pages = "1507--1512",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "4",

}

TY - JOUR

T1 - Study of Ion-Beam-Sputtered ZnO Films as a Function of Deposition Temperature

AU - NREL, null

PY - 1994

Y1 - 1994

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DO - 10.1116/1.579346

M3 - Article

SN - 0734-2101

VL - 12

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EP - 1512

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 4

ER -