Study of Sputtered HfO2 Thin Films on Silicon

Research output: Contribution to journal › Article

NREL Publication Number

@article{fe03a8d436b148188b5c9b6e68a2e685,

title = "Study of Sputtered HfO2 Thin Films on Silicon",

author = "NREL",

year = "1992",

doi = "10.1016/0040-6090(92)90291-I",

language = "American English",

volume = "213",

pages = "257--264",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

number = "2",

}