@conference{f7eb4b3a43ee4277b03278719e88d051,
title = "Sulfur Hexafluoride (SF6) as Fluorine Dopant Precursor for Production of Fluorine Doped Tin Oxide Films by MOCVD",
keywords = "basic sciences, materials science",
author = "Matthew Young and Xiaonon Li and Matthew Torres and Carrie Wyse and Matty Scott",
year = "2009",
doi = "10.1109/pvsc.2009.5411291",
language = "American English",
pages = "2435--2438",
note = "34th IEEE Photovoltaic Specialists Conference (PVSC \'09) ; Conference date: 07-06-2009 Through 12-06-2009",
}