Sulfur Hexafluoride (SF6) as Fluorine Dopant Precursor for Production of Fluorine Doped Tin Oxide Films by MOCVD

Carrie Wyse, Robert Torres, Teresa Barnes, Marty Scott, Matt Young, Xiaonan Li, Tim Gessert

Research output: Contribution to conferencePaperpeer-review

2 Scopus Citations

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