Original language | American English |
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Pages (from-to) | 618-619 |
Number of pages | 2 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 1 |
Issue number | 2, Part I |
DOIs | |
State | Published - 1983 |
NREL Publication Number
- ACNR/JA-213-4089