| Original language | American English |
|---|---|
| Title of host publication | CVD of Nonmetals |
| Pages | 37-150 |
| DOIs | |
| State | Published - 1996 |
NLR Publication Number
- NREL/CH-24910
Research output: Chapter in Book/Report/Conference proceeding › Chapter
| Original language | American English |
|---|---|
| Title of host publication | CVD of Nonmetals |
| Pages | 37-150 |
| DOIs | |
| State | Published - 1996 |