Superimposed RF/DC Magnetron Sputtering of Transparent Ga:ZnO with High Conductivity for Photovoltaic Contacts Applications

Ajaya K. Sigdel; Paul F. Ndione; Yi Ke; N. Edwin Widjonarko; John D. Perkins; Maikel F.A.M. Van Hest; Sean E. Shaheen; Thomas Gennett; David S. Ginley; Joseph J. Berry

doi:10.1109/PVSC.2010.5616854

Superimposed RF/DC Magnetron Sputtering of Transparent Ga:ZnO with High Conductivity for Photovoltaic Contacts Applications

Ajaya K. Sigdel, Paul F. Ndione, Yi Ke, N. Edwin Widjonarko, John D. Perkins, Maikel F.A.M. Van Hest, Sean E. Shaheen, Thomas Gennett, David S. Ginley, Joseph J. Berry

Research output: Contribution to conference › Paper › peer-review

1 Scopus Citations

Abstract

Transparent conducting oxides (TCOs) based on gallium-doped ZnO (GZO) are deposited using a radio-frequency (RF) superimposed direct current (DC) magnetron system. The electrical, optical, and structural properties of GZO films deposited by varying the RF/DC power ratio are presented. Our results indicate an increase in conductivity of GZO films up to 3800 S/cm when grown in a pure argon atmosphere at an RF/DC power ratio of 1:1. Optical transmittance for all films is ∼90% in the visible range. We find our high-conductivity samples to be highly textured wurtzite ZnO with the c-axis oriented perpendicular to the substrate. The films are relatively smooth with root-mean-square surface roughness of 2.0 nm. This high-performance GZO material deposited using this approach can pave the way to development of high-conductivity TCOs at low cost from Earth-abundant materials to enable cost-effective solar conversion technologies.

Original language	American English
Pages	3270-3274
Number of pages	5
DOIs	https://doi.org/10.1109/PVSC.2010.5616854 https://doi.org/10.1109/PVSC.2010.5616854
State	Published - 2010
Event	35th IEEE Photovoltaic Specialists Conference, PVSC 2010 - Honolulu, HI, United States Duration: 20 Jun 2010 → 25 Jun 2010

Conference

Conference	35th IEEE Photovoltaic Specialists Conference, PVSC 2010
Country/Territory	United States
City	Honolulu, HI
Period	20/06/10 → 25/06/10

NREL Publication Number

NREL/CP-520-47728

Keywords

magnetron sputtering
solar photovoltaics

Access to Document

Cite this

Sigdel, A. K., Ndione, P. F., Ke, Y., Widjonarko, N. E., Perkins, J. D., Van Hest, M. F. A. M., Shaheen, S. E., Gennett, T., Ginley, D. S., & Berry, J. J. (2010). Superimposed RF/DC Magnetron Sputtering of Transparent Ga:ZnO with High Conductivity for Photovoltaic Contacts Applications. 3270-3274. Paper presented at 35th IEEE Photovoltaic Specialists Conference, PVSC 2010, Honolulu, HI, United States. https://doi.org/10.1109/PVSC.2010.5616854, https://doi.org/10.1109/PVSC.2010.5616854

@conference{41431b6abd2b49f88ccc9a717d6fb458,

title = "Superimposed RF/DC Magnetron Sputtering of Transparent Ga:ZnO with High Conductivity for Photovoltaic Contacts Applications",

abstract = "Transparent conducting oxides (TCOs) based on gallium-doped ZnO (GZO) are deposited using a radio-frequency (RF) superimposed direct current (DC) magnetron system. The electrical, optical, and structural properties of GZO films deposited by varying the RF/DC power ratio are presented. Our results indicate an increase in conductivity of GZO films up to 3800 S/cm when grown in a pure argon atmosphere at an RF/DC power ratio of 1:1. Optical transmittance for all films is ∼90% in the visible range. We find our high-conductivity samples to be highly textured wurtzite ZnO with the c-axis oriented perpendicular to the substrate. The films are relatively smooth with root-mean-square surface roughness of 2.0 nm. This high-performance GZO material deposited using this approach can pave the way to development of high-conductivity TCOs at low cost from Earth-abundant materials to enable cost-effective solar conversion technologies.",

keywords = "magnetron sputtering, solar photovoltaics",

author = "Sigdel, {Ajaya K.} and Ndione, {Paul F.} and Yi Ke and Widjonarko, {N. Edwin} and Perkins, {John D.} and {Van Hest}, {Maikel F.A.M.} and Shaheen, {Sean E.} and Thomas Gennett and Ginley, {David S.} and Berry, {Joseph J.}",

year = "2010",

doi = "10.1109/PVSC.2010.5616854",

language = "American English",

pages = "3270--3274",

note = "35th IEEE Photovoltaic Specialists Conference, PVSC 2010 ; Conference date: 20-06-2010 Through 25-06-2010",

}

Sigdel, AK, Ndione, PF, Ke, Y, Widjonarko, NE, Perkins, JD, Van Hest, MFAM, Shaheen, SE, Gennett, T , Ginley, DS & Berry, JJ 2010, 'Superimposed RF/DC Magnetron Sputtering of Transparent Ga:ZnO with High Conductivity for Photovoltaic Contacts Applications', Paper presented at 35th IEEE Photovoltaic Specialists Conference, PVSC 2010, Honolulu, HI, United States, 20/06/10 - 25/06/10 pp. 3270-3274. https://doi.org/10.1109/PVSC.2010.5616854, https://doi.org/10.1109/PVSC.2010.5616854

TY - CONF

T1 - Superimposed RF/DC Magnetron Sputtering of Transparent Ga:ZnO with High Conductivity for Photovoltaic Contacts Applications

AU - Sigdel, Ajaya K.

AU - Ndione, Paul F.

AU - Ke, Yi

AU - Widjonarko, N. Edwin

AU - Perkins, John D.

AU - Van Hest, Maikel F.A.M.

AU - Shaheen, Sean E.

AU - Gennett, Thomas

AU - Ginley, David S.

AU - Berry, Joseph J.

PY - 2010

Y1 - 2010

N2 - Transparent conducting oxides (TCOs) based on gallium-doped ZnO (GZO) are deposited using a radio-frequency (RF) superimposed direct current (DC) magnetron system. The electrical, optical, and structural properties of GZO films deposited by varying the RF/DC power ratio are presented. Our results indicate an increase in conductivity of GZO films up to 3800 S/cm when grown in a pure argon atmosphere at an RF/DC power ratio of 1:1. Optical transmittance for all films is ∼90% in the visible range. We find our high-conductivity samples to be highly textured wurtzite ZnO with the c-axis oriented perpendicular to the substrate. The films are relatively smooth with root-mean-square surface roughness of 2.0 nm. This high-performance GZO material deposited using this approach can pave the way to development of high-conductivity TCOs at low cost from Earth-abundant materials to enable cost-effective solar conversion technologies.

AB - Transparent conducting oxides (TCOs) based on gallium-doped ZnO (GZO) are deposited using a radio-frequency (RF) superimposed direct current (DC) magnetron system. The electrical, optical, and structural properties of GZO films deposited by varying the RF/DC power ratio are presented. Our results indicate an increase in conductivity of GZO films up to 3800 S/cm when grown in a pure argon atmosphere at an RF/DC power ratio of 1:1. Optical transmittance for all films is ∼90% in the visible range. We find our high-conductivity samples to be highly textured wurtzite ZnO with the c-axis oriented perpendicular to the substrate. The films are relatively smooth with root-mean-square surface roughness of 2.0 nm. This high-performance GZO material deposited using this approach can pave the way to development of high-conductivity TCOs at low cost from Earth-abundant materials to enable cost-effective solar conversion technologies.

KW - magnetron sputtering

KW - solar photovoltaics

UR - http://www.scopus.com/inward/record.url?scp=78650148101&partnerID=8YFLogxK

U2 - 10.1109/PVSC.2010.5616854

DO - 10.1109/PVSC.2010.5616854

M3 - Paper

AN - SCOPUS:78650148101

SP - 3270

EP - 3274

T2 - 35th IEEE Photovoltaic Specialists Conference, PVSC 2010

Y2 - 20 June 2010 through 25 June 2010

ER -

Sigdel AK, Ndione PF, Ke Y, Widjonarko NE, Perkins JD, Van Hest MFAM et al.. Superimposed RF/DC Magnetron Sputtering of Transparent Ga:ZnO with High Conductivity for Photovoltaic Contacts Applications. 2010. Paper presented at 35th IEEE Photovoltaic Specialists Conference, PVSC 2010, Honolulu, HI, United States. doi: 10.1109/PVSC.2010.5616854, 10.1109/PVSC.2010.5616854

Superimposed RF/DC Magnetron Sputtering of Transparent Ga:ZnO with High Conductivity for Photovoltaic Contacts Applications

Abstract

Conference

NREL Publication Number

Keywords

Access to Document

Other files and links

Fingerprint

Cite this