Abstract
Hydride vapor phase epitaxy (HVPE) is a promising technology that can aid in the cost reduction of III-V materials and devices manufacturing, particularly high-efficiency solar cells for space and terrestrial applications. However, recent demonstrations of ultrafast growth rates via uncracked hydrides are not well described by present models for the growth. Therefore, it is necessary to understand the kinetics of the growth process and its coupling with transport phenomena, so as to enable fast and uniform epitaxial growth. In this work, we derive a kinetic model using experimental data and integrate it into a computational fluid dynamics simulation of an HVPE growth reactor. We also modify an existing hydride cracking model that we validate against numerical simulations and experimental data. We show that the developed growth model and the improved cracking model are able to reproduce experimental growth measurements of GaAs in an existing HVPE system.
Original language | American English |
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Article number | 115702 |
Number of pages | 14 |
Journal | Journal of Applied Physics |
Volume | 130 |
Issue number | 11 |
DOIs | |
State | Published - 21 Sep 2021 |
Bibliographical note
Publisher Copyright:© 2021 Author(s).
NREL Publication Number
- NREL/JA-2C00-80068
Keywords
- adsorption kinetics
- chemical vapor deposition
- computational fluid dynamics
- III-V semiconductors