Surface Hydride Composition of Plasma-Synthesized Si Nanoparticles

Bhavin N. Jariwala, Nicolaas J. Kramer, M. Cristina Petcu, David C. Bobela, M. C.M.Van De Sanden, Paul Stradins, Cristian V. Ciobanu, Sumit Agarwal

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37 Scopus Citations


We have determined the surface hydride composition of amorphous and crystalline Si nanoparticles (NPs) (3-5 nm) synthesized in a low-temperature SiH4/Ar plasma using in situ attenuated total reflection Fourier-transform infrared spectroscopy and H2 thermal effusion measurements. With increasing power to the plasma source, the particles transition from amorphous to crystalline with a corresponding increase in the fraction of SiH species on the surface. The surface hydride composition indicates that Si NPs synthesized at higher plasma powers crystallize in the gas-phase due to a greater degree of plasma-induced heating, which enhances the desorption rates for SiH2 and SiH3. Furthermore, these Si NPs do not contain any detectable H in the bulk.

Original languageAmerican English
Pages (from-to)20375-20379
Number of pages5
JournalJournal of Physical Chemistry C
Issue number42
StatePublished - 2011

NREL Publication Number

  • NREL/JA-5200-52789


  • amorphous
  • crystalline
  • plasma synthesis
  • Si nanoparticles
  • SiHx
  • SiNP


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