Abstract
We have determined the surface hydride composition of amorphous and crystalline Si nanoparticles (NPs) (3-5 nm) synthesized in a low-temperature SiH4/Ar plasma using in situ attenuated total reflection Fourier-transform infrared spectroscopy and H2 thermal effusion measurements. With increasing power to the plasma source, the particles transition from amorphous to crystalline with a corresponding increase in the fraction of SiH species on the surface. The surface hydride composition indicates that Si NPs synthesized at higher plasma powers crystallize in the gas-phase due to a greater degree of plasma-induced heating, which enhances the desorption rates for SiH2 and SiH3. Furthermore, these Si NPs do not contain any detectable H in the bulk.
Original language | American English |
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Pages (from-to) | 20375-20379 |
Number of pages | 5 |
Journal | Journal of Physical Chemistry C |
Volume | 115 |
Issue number | 42 |
DOIs | |
State | Published - 2011 |
NREL Publication Number
- NREL/JA-5200-52789
Keywords
- amorphous
- crystalline
- plasma synthesis
- Si nanoparticles
- SiHx
- SiNP