Surface Morphology of Chemical Vapor Deposition Grown Ge on Ge Substrates

Research output: Contribution to journal › Article

Original language	American English
Pages (from-to)	2482-2491
Number of pages	10
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	4
Issue number	6
DOIs	https://doi.org/10.1116/1.573715
State	Published - 1986

NREL Publication Number

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title = "Surface Morphology of Chemical Vapor Deposition Grown Ge on Ge Substrates",

author = "NREL",

year = "1986",

doi = "10.1116/1.573715",

language = "American English",

volume = "4",

pages = "2482--2491",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "6",

}

TY - JOUR

T1 - Surface Morphology of Chemical Vapor Deposition Grown Ge on Ge Substrates

AU - NREL, null

PY - 1986

Y1 - 1986

U2 - 10.1116/1.573715

DO - 10.1116/1.573715

M3 - Article

SN - 0734-2101

VL - 4

SP - 2482

EP - 2491

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 6

ER -