Surface Reactions in Discharge and CVD Deposition of Silane

Surface Reactions in Discharge and CVD Deposition of Silane

Research output: Contribution to conference › Paper

Original language	American English
Pages	3-10
Number of pages	8
State	Published - 1986
Event	Materials Research Society Spring Meeting - Palo Alto, California Duration: 15 Apr 1986 → 18 Apr 1986

Conference

Conference	Materials Research Society Spring Meeting
City	Palo Alto, California
Period	15/04/86 → 18/04/86

Bibliographical note

Work performed by Joint Institute for Laboratory Astrophysics, University of Colorado, Boulder, Colorado, and National Bureau of Standards, Boulder, Colorado

NREL Publication Number

ACNR/CP-8314

Cite this

@conference{ec0dbbf2e3934f88b0d5086e665064e1,

title = "Surface Reactions in Discharge and CVD Deposition of Silane",

author = "NREL",

note = "Work performed by Joint Institute for Laboratory Astrophysics, University of Colorado, Boulder, Colorado, and National Bureau of Standards, Boulder, Colorado; Materials Research Society Spring Meeting ; Conference date: 15-04-1986 Through 18-04-1986",

year = "1986",

language = "American English",

pages = "3--10",

}

TY - CONF

T1 - Surface Reactions in Discharge and CVD Deposition of Silane

AU - NREL, null

N1 - Work performed by Joint Institute for Laboratory Astrophysics, University of Colorado, Boulder, Colorado, and National Bureau of Standards, Boulder, Colorado

PY - 1986

Y1 - 1986

M3 - Paper

SP - 3

EP - 10

T2 - Materials Research Society Spring Meeting

Y2 - 15 April 1986 through 18 April 1986

ER -