Original language | American English |
---|---|
Pages (from-to) | 2176-2181 |
Number of pages | 6 |
Journal | Journal of vacuum science & technology |
Volume | B 9 |
Issue number | 4 |
DOIs | |
State | Published - 1991 |
NREL Publication Number
- ACNR/JA-212-12556
Research output: Contribution to journal › Article
Original language | American English |
---|---|
Pages (from-to) | 2176-2181 |
Number of pages | 6 |
Journal | Journal of vacuum science & technology |
Volume | B 9 |
Issue number | 4 |
DOIs | |
State | Published - 1991 |