| Original language | American English |
|---|---|
| Pages (from-to) | 2176-2181 |
| Number of pages | 6 |
| Journal | Journal of vacuum science & technology |
| Volume | B 9 |
| Issue number | 4 |
| DOIs | |
| State | Published - 1991 |
NREL Publication Number
- ACNR/JA-212-12556
Research output: Contribution to journal › Article
| Original language | American English |
|---|---|
| Pages (from-to) | 2176-2181 |
| Number of pages | 6 |
| Journal | Journal of vacuum science & technology |
| Volume | B 9 |
| Issue number | 4 |
| DOIs | |
| State | Published - 1991 |