Surface Type Conversion of InP by H2S Plasma Exposure: A Photoemission Investigation

Research output: Contribution to journal › Article

Original language	American English
Pages (from-to)	1022-1027
Number of pages	6
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	11
Issue number	4 (I)
DOIs	https://doi.org/10.1116/1.578807
State	Published - 1993

NREL Publication Number

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title = "Surface Type Conversion of InP by H2S Plasma Exposure: A Photoemission Investigation",

author = "NREL",

year = "1993",

doi = "10.1116/1.578807",

language = "American English",

volume = "11",

pages = "1022--1027",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "4 (I)",

}

TY - JOUR

T1 - Surface Type Conversion of InP by H2S Plasma Exposure: A Photoemission Investigation

AU - NREL, null

PY - 1993

Y1 - 1993

U2 - 10.1116/1.578807

DO - 10.1116/1.578807

M3 - Article

SN - 0734-2101

VL - 11

SP - 1022

EP - 1027

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 4 (I)

ER -