Original language | American English |
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Pages | 149-158 |
Number of pages | 10 |
State | Published - 1997 |
Event | Material and Process Characterization for VLSI: Fourth International Conference (ICMPC '97) - Shanghai, China Duration: 4 Nov 1997 → 7 Nov 1997 |
Conference
Conference | Material and Process Characterization for VLSI: Fourth International Conference (ICMPC '97) |
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City | Shanghai, China |
Period | 4/11/97 → 7/11/97 |
NREL Publication Number
- NREL/CP-450-23061