| Original language | American English |
|---|---|
| Pages | 149-158 |
| Number of pages | 10 |
| State | Published - 1997 |
| Event | Material and Process Characterization for VLSI: Fourth International Conference (ICMPC '97) - Shanghai, China Duration: 4 Nov 1997 → 7 Nov 1997 |
Conference
| Conference | Material and Process Characterization for VLSI: Fourth International Conference (ICMPC '97) |
|---|---|
| City | Shanghai, China |
| Period | 4/11/97 → 7/11/97 |
NREL Publication Number
- NREL/CP-450-23061