Abstract
Systems and methods for solar cells with CIS and CIGS films made by reacting evaporated copper chlorides with selenium are provided. In one embodiment, a method for fabricating a thin film device comprises: providing a semiconductor film comprising indium (In) and selenium (Se) upon a substrate; heating the substrate and the semiconductor film to a desired temperature; and performing a mass transport through vapor transport of a copper chloride vapor and se vapor to the semiconductor film within a reaction chamber.
Original language | American English |
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Patent number | 9,054,264 B2 |
Filing date | 9/06/15 |
State | Published - 2015 |
NREL Publication Number
- NREL/PT-5K00-65238