@article{8a8421eb5d15416996a66f6896bc7236,
title = "Effect of the Film H Content on the Crystallizaiton of Laser Processed and Thermally Annealed HWCVD a-Si:H",
keywords = "hot-wire chemical vapor deposition, HWCVD, silicon thin films",
author = "A.H. Mahan",
year = "2010",
doi = "10.1002/pssc.200982706",
language = "American English",
volume = "7",
pages = "596--599",
journal = "Physica Status Solidi (C) Current Topics in Solid State Physics",
issn = "1862-6351",
publisher = "Wiley-VCH Verlag",
number = "3-4",
}