Thickness Evolution of the Microstructural and Optical Properties of Si:H Films in the Amorphous-to-Microcrystalline Phase Transition Region

Material Science

• Optical Property 100%
• Microcrystalline Silicon 100%
• Solar Cell 50%
• Film 50%
• Density 50%
• Amorphous Silicon 50%
• Volume Fraction 50%
• Plasma-Enhanced Chemical Vapor Deposition 50%
• Nucleation 50%
• Thin Films 50%
• Crystallite 50%

Engineering

• Microcrystalline 100%
• Microcrystalline Silicon 100%
• Film Solar Cell 50%
• Performed Measurement 50%
• Mixed Phase 50%
• Good Correlation 50%
• Thin Films 50%
• Chemical Vapor Deposition 50%
• Vapor Deposition 50%
• Crystallite 50%

Chemical Engineering

• Film 100%
• Spectroscopic Ellipsometry 50%
• Plasma Enhanced Chemical Vapor Deposition 50%