Thin Films of a-Si1-xGex:H Alloys by Dual Magnetron Sputtering in a UHV Chamber

Research output: Contribution to journal › Article

Original language	American English
Pages (from-to)	567-571
Number of pages	5
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	3
Issue number	3, Part I
DOIs	https://doi.org/10.1116/1.572995
State	Published - 1985

Work performed by Department of Physics, North Carolina State University, Raleigh, North Carolina

NREL Publication Number

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title = "Thin Films of a-Si1-xGex:H Alloys by Dual Magnetron Sputtering in a UHV Chamber",

author = "NREL",

note = "Work performed by Department of Physics, North Carolina State University, Raleigh, North Carolina",

year = "1985",

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language = "American English",

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journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "3, Part I",

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T1 - Thin Films of a-Si1-xGex:H Alloys by Dual Magnetron Sputtering in a UHV Chamber

AU - NREL, null

N1 - Work performed by Department of Physics, North Carolina State University, Raleigh, North Carolina

PY - 1985

Y1 - 1985

U2 - 10.1116/1.572995

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M3 - Article

SN - 0734-2101

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JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 3, Part I

ER -