Transparent Conducting Oxides and Production Thereof

Timothy Gessert; Timothy Coutts; Yuki Yoshida

Transparent Conducting Oxides and Production Thereof

Timothy Gessert (Inventor), Timothy Coutts (Inventor), Yuki Yoshida (Inventor)

Materials Science

Research output: Patent

Abstract

Transparent conducting oxides and production thereof are disclosed. An exemplary method of producing a transparent conducting oxide (TCO) material may comprise: providing a TCO target (110) doped with either a high-permittivity oxide or a low-permittivity oxide in a process chamber (100). The method may also comprise depositing a metal oxide on the target (110) to form a thin film having enhancedoptical properties without substantially decreasing electrical quality.

Original language	American English
Patent number	8,734,621
Filing date	27/05/14
State	Published - 2014

Bibliographical note

Assignee: Alliance for Sustainable Energy, LLC (Golden, CO)

NREL Publication Number

NREL/PT-5K00-62975

Access to Document

https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8734621

Cite this

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title = "Transparent Conducting Oxides and Production Thereof",

abstract = "Transparent conducting oxides and production thereof are disclosed. An exemplary method of producing a transparent conducting oxide (TCO) material may comprise: providing a TCO target (110) doped with either a high-permittivity oxide or a low-permittivity oxide in a process chamber (100). The method may also comprise depositing a metal oxide on the target (110) to form a thin film having enhancedoptical properties without substantially decreasing electrical quality.",

author = "Timothy Gessert and Timothy Coutts and Yuki Yoshida",

note = "Assignee: Alliance for Sustainable Energy, LLC (Golden, CO); 8,734,621",

year = "2014",

language = "American English",

type = "Patent",

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TY - PAT

T1 - Transparent Conducting Oxides and Production Thereof

AU - Gessert, Timothy

AU - Coutts, Timothy

AU - Yoshida, Yuki

N1 - Assignee: Alliance for Sustainable Energy, LLC (Golden, CO)

PY - 2014

Y1 - 2014

N2 - Transparent conducting oxides and production thereof are disclosed. An exemplary method of producing a transparent conducting oxide (TCO) material may comprise: providing a TCO target (110) doped with either a high-permittivity oxide or a low-permittivity oxide in a process chamber (100). The method may also comprise depositing a metal oxide on the target (110) to form a thin film having enhancedoptical properties without substantially decreasing electrical quality.

AB - Transparent conducting oxides and production thereof are disclosed. An exemplary method of producing a transparent conducting oxide (TCO) material may comprise: providing a TCO target (110) doped with either a high-permittivity oxide or a low-permittivity oxide in a process chamber (100). The method may also comprise depositing a metal oxide on the target (110) to form a thin film having enhancedoptical properties without substantially decreasing electrical quality.

M3 - Patent

M1 - 8,734,621

Y2 - 2014/05/27

ER -

Transparent Conducting Oxides and Production Thereof

Abstract

Bibliographical note

NREL Publication Number

Access to Document

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Cite this