Transparent Conducting Oxides and Production Thereof

Timothy Gessert (Inventor), Timothy Coutts (Inventor), Yuki Yoshida (Inventor)

Research output: Patent


Transparent conducting oxides and production thereof are disclosed. An exemplary method of producing a transparent conducting oxide (TCO) material may comprise: providing a TCO target (110) doped with either a high-permittivity oxide or a low-permittivity oxide in a process chamber (100). The method may also comprise depositing a metal oxide on the target (110) to form a thin film having enhancedoptical properties without substantially decreasing electrical quality.
Original languageAmerican English
Patent number8,734,621
Filing date27/05/14
StatePublished - 2014

Bibliographical note

Assignee: Alliance for Sustainable Energy, LLC (Golden, CO)

NREL Publication Number

  • NREL/PT-5K00-62975


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