Original language | American English |
---|---|
Pages (from-to) | 711-715 |
Number of pages | 5 |
Journal | Journal of vacuum science & technology |
Volume | 16 |
Issue number | 2 |
DOIs | |
State | Published - 1979 |
NREL Publication Number
- ACNR/JA-255-2895
Research output: Contribution to journal › Article
Original language | American English |
---|---|
Pages (from-to) | 711-715 |
Number of pages | 5 |
Journal | Journal of vacuum science & technology |
Volume | 16 |
Issue number | 2 |
DOIs | |
State | Published - 1979 |