Understanding Reproducibility of Sputter Deposited Metastable Ferroelectric Wurtzite Al0.6Sc0.4N Films using In‐situ Optical Emission Spectrometry

Daniel Drury, Keisuke Yazawa, Allison Mis, Kevin Talley, Andriy Zakutayev, Geoff L. Brennecka

Research output: Contribution to journal › Article › peer-review

29 Scopus Citations

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