Update on Silicon Deposition Performed by Hot Wire CVD

Research output: Contribution to journal › Article › peer-review

NREL Publication Number

@article{9c6ff62817724eac8ed69616948bfdeb,

title = "Update on Silicon Deposition Performed by Hot Wire CVD",

keywords = "hot wire, microcrystalline silicon, protocrystalline silicon, silicon germanium",

author = "NREL",

year = "2006",

doi = "10.1016/j.tsf.2005.07.086",

language = "American English",

volume = "501",

pages = "3--7",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

number = "1-2",

}

TY - JOUR

T1 - Update on Silicon Deposition Performed by Hot Wire CVD

AU - NREL, null

PY - 2006

Y1 - 2006

KW - hot wire

KW - microcrystalline silicon

KW - protocrystalline silicon

KW - silicon germanium

U2 - 10.1016/j.tsf.2005.07.086

DO - 10.1016/j.tsf.2005.07.086

M3 - Article

SN - 0040-6090

VL - 501

SP - 3

EP - 7

JO - Thin Solid Films

JF - Thin Solid Films

IS - 1-2

ER -