Use of an Ion Gauge Beam Flux Monitor for Resistivity Control in CuInSe2 Grown by Molecular Beam Epitaxy

C. Y. Huang, S. M. Morse, A. H. Clark, L. L. Kazmerski

Research output: Contribution to journalArticlepeer-review

12 Scopus Citations

Abstract

We have constructed and utilized a miniature ion gauge to set the copper, indium and selenium fluxes for the growth of CuInSe2 onto CdS to form solar photovoltaic heterojunctions. Resistivities from 0.01 Ω cm n type to 0.001 Ω cm p type can be reliably achieved to within a factor of 10 of the desired value. The copper-to-indium arrival rate ratio is critical in determining the layer resistivity of p-type material, with a high copper-to-indium ratio generally giving low resistivity. The selenium arrival rate is also important, however, in that low selenium rates always lead to n-type layers, independent of the copper-to-indium arrival rate ratio.

Original languageAmerican English
Pages (from-to)191-195
Number of pages5
JournalSolar Cells
Volume6
Issue number2
DOIs
StatePublished - 1982

Bibliographical note

Work performed by University of Maine, Orono, Maine, and Solar Energy Research Institute, Golden, Colorado

NREL Publication Number

  • ACNR/JA-213-4273

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