Use of Electric Probes in Silane Radio Frequency Discharges

    Research output: Contribution to journalArticle

    Original languageAmerican English
    Pages (from-to)4916-4927
    Number of pages12
    JournalJournal of Applied Physics
    Volume54
    Issue number9
    DOIs
    StatePublished - 1983

    NREL Publication Number

    • ACNR/JA-212-4066

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